Photoluminescence-Based Real-Time Monitoring for Dimensional Characterization of Nanostructures Fabricated by Direct Laser Writing (DLW)
DOI:
https://doi.org/10.22399/ijcesen.5397Keywords:
Photoluminescence, Real-time monitoring, Direct Laser Writing (DLW), Nanostructure fabrication, Dimensional accuracyAbstract
Real-time monitoring during nanostructure fabrication is essential to ensure fabrication accuracy and process reliability. In Direct Laser Writing (DLW), optical microscopy is commonly employed to observe the fabricate on process; however, it only provides visual images and cannot accurately determine the dimensions or geometry of the fabricated structures. This study proposes a photoluminescence (PL)-based monitoring technique for real-time dimensional characterization during DLW fabrication. The proposed method utilizes differences in PL intensity between polymerized nanostructures and the surrounding photoresist. By scanning a low-power laser probe through the fabrication region and recording the PL response, the shape and dimensions of embedded nanostructures can be reconstructed during fabrication. Experimental results demonstrate that the proposed PL-based monitoring technique can accurately reconstruct the geometry of fabricated structures. After compensation of systematic measurement errors, the average dimensional errors were reduced to 0.48 μm and 0.32 μm in the horizontal and vertical scanning directions, respectively. These results demonstrate the potential of the proposed technique as a non-destructive real-time monitoring method to improve the efficiency, accuracy, and reliability of DLW-based nanostructure fabrication.
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